Overview

Vulcan Technology is a high-tech enterprise focusing on the development and production of high-end thermal field materials.

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Product: Carbon fiber soft felt Carbon fibre composite rigid felts (long and short) C/C Composite structural materials High purity graphite High performance coating materials Other

Application: Compound semiconductors (substrates) Compound semiconductor (epitaxial) Silicon-based semiconductor Photovoltaic monocrystalline silicon Photovoltaic cell Optical communication Industrial Furnaces & Various Furnace Types Hydrogen energy storage & Flow battery

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Home>Product>Carbon fibre composite rigid felts (long and short)>Epitaxial Felt

Epitaxial Felt

● Designed specifically for SiC epitaxial process, unique assembly structure, high resistivity, avoids sparking
● Has good thermal insulation performance

优点

: Specially designed for SiC epitaxial process, unique assembly structure, high resistivity, avoid sparking

: Has good thermal insulation performance

Performance Indicators

Performance Indicators		Units	Vulan Models
Performance Indicators		Units	VU-LRF-PD	VU-LRF-PR	VU-LRF-VB	VU-SRF-V	VU-LRF-SPG
Density		g/cm³	0.16±0.02	0.16±0.02	0.18±0.02	0.18±0.02	0.25±0.02
Carbon Content		wt	>99.9	>99.9	>99.9	>99.9	>99.9
Heat-Treatment Temperature		℃	2400	2400	2400	2400	2400
Average Thermal Conductivity 1000℃		W/（m·K）	0.23	0.18	0.17	0.25	0.44
Ash Content		ppm	<20	<20	<20	<20	<200
Compressive Strength		Mpa	1.80	1.50	1.20	0.50	2.31
Bending Strength		Mpa	1.33	1.26	1.00	0.50	1.80
Usage Environment	Vacuum	℃	2400	2400	2400	2400	2400
Usage Environment	Inert Gas	℃	3200	3200	3200	3200	3200

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