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● Specially designed for SiC epitaxial process, unique assembly structure, high resistivity, avoid sparking
● Good thermal insulation performance
Physical Characteristics | Unit | Standard Products | High Purity products | Ultra Pure Products | |
Carbon Fiber | PAN 基碳纤维 | PAN 基碳纤维 | PAN 基碳纤维 | ||
Density | g/cm³ | 0.15-0.17 | 0.15-0.16 | 0.15-0.16 | |
Carbon Content | wt | 99.9 | 99.99 | 99.999 | |
Heat-Treatment Temperature | ℃ | 2000-2400 | 2400 | 2400 | |
Average Thermal Conductivity 25℃ | W/(m·K) | 0.076 | 0.076 | 0.076 | |
Average Thermal Conductivity 1000℃ | W/(m·K) | 0.25 | 0.23 | 0.23 | |
Thermal Expansion Factor 1500℃ | 10-6/℃ | 3.4 | 3.2 | 3 | |
Ash Content | ppm | <200 | <20 | <5 | |
Compressive Strength | Face Direction(5%) | Mpa | 0.236 | 0.225 | 0.225 |
Two-sided Direction | 1.79 | 1.77 | 1.55 | ||
Bending Strength | Face Direction(5%) | Mpa | 0.395 | 0.39 | 0.36 |
Two-sided Direction | 1.33 | 1.20 | 1.15 | ||
Resistivity | Face Direction(5%) | Ω.m | 6.64*10-3 | 5.51*10-3 | 5.28*10-3 |
Two-sided Direction | 7.22*10-4 | 6.73*10-4 | 6.73*10-4 | ||
Usage Environment | Air | ℃ | |||
Vacuum | 2400 | 2400 | 2400 | ||
Inert Gas | 3200 | 3200 | 3200 |
*Custom sizes available on request