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Rigid Felt Cylinder
dvantages:

● Specially designed for SiC epitaxial process, unique assembly structure, high resistivity, avoid sparking 

● Good thermal insulation performance

Performance Indicators
Physical CharacteristicsUnitStandard ProductsHigh Purity productsUltra Pure Products
Carbon Fiber
PAN 基碳纤维PAN 基碳纤维PAN 基碳纤维
Densityg/cm³0.15-0.170.15-0.160.15-0.16
Carbon Contentwt99.999.9999.999
Heat-Treatment Temperature2000-240024002400
Average Thermal Conductivity  25℃W/(m·K)0.0760.0760.076
Average Thermal Conductivity    1000℃W/(m·K)0.250.230.23
Thermal Expansion Factor  1500℃10-6/℃3.43.23
Ash Contentppm<200<20<5
Compressive StrengthFace Direction(5%)Mpa0.2360.2250.225
Two-sided Direction1.791.771.55
Bending StrengthFace Direction(5%)Mpa0.3950.390.36
Two-sided Direction1.331.201.15
ResistivityFace Direction(5%)Ω.m6.64*10-35.51*10-35.28*10-3
Two-sided Direction7.22*10-46.73*10-46.73*10-4
Usage EnvironmentAir


Vacuum240024002400
Inert Gas320032003200

*Custom sizes available on request


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